| 제품 | 제품소개 | 바로가기 |
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Hand held instrument(Rs/Res)
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EP-80P (Portable)
Hand held instrument(Rs/Res)
제품 용도
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제품 특징
- Hand held eddy current probe measurement instrument
- Auto-measurement start by probe head contacting to sample
- 3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance
- Easy set up to measurement condition by JOG dial
- 5 types of model for each measuring range
- Resistivity probe can be changed by sample’s resistivity range
제품 사양
- Rs : 0.01~3000Ω/sq
- Res : 0.001~200Ω·cm
*The range is separated from each Low, Middle, High S-High, Solar-wafer probe type.
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Size : Any kinds of sizes (more than 14 mm)
- Res : Low – 0.001~0.05 Ω·cm Rs : Low – 0.01~0.5 Ω/sq
Middle – 0.05~0.5 Ω·cm Middle – 0.5~10 Ω/sq
High – 0.5~60 Ω·cm High – 10~1000 Ω/sq
Super High – 60~200 Ω·cm Super High – 1000~3000 Ω/sq
Solar Wafer – 0.2~15 Ω·cm Solar - 5~500 Ω/sq
- Main unit:W255*D275*H95mm, 4kg
- Probe:20mm dia.*80mm

