| 제품 | 제품소개 | 바로가기 |
|---|---|---|
|
Surface Profiler
|
목록보기 |
KLA Tencor
Surface Profiler
제품 용도
-
제품 사양
| Sample Stage Diameter | 150 mm |
|---|---|
| Scan Length Range | 10 mm max. |
| Sample (Thin film + Substrate) Thickness | 21 mm max |
| Vertical Resolution | 0.1 Å @ 20 µm |
| Magnification | 88 ~ 247X (Manual) |
| Step Height Repeatability | 0 nm in the 13 µm range |
